Shared equipment

Top
Shared equipment
Cross Section Polisher

Shared equipment

Cross Section Polisher

Cross Section Polisher
IB-09020CP　

Equipment Overview (Purpose)

A cross-polisher machine that enables cross-sectional machining with Ar gas while observing it with a monitor camera. This allows for machining without exposing the SEM observation sample to the atmosphere.

Main Features and Applications

【Features】

Ion acceleration voltage of up to 6 kV and sample cooling temperature of -120°C are possible.　Cross-sectional machining can be performed without exposing the sample to the atmosphere using a monitor camera for machining observation. (By using a dedicated transfer vessel, the cross-sectioned surface can be observed on the JSM-7800F without being exposed to the atmosphere.
Using argon gas, cross-sectional specimens can be prepared with less damage to soft, hard, and brittle samples.

【Applications】

Effective for metals and inorganic materials that are likely to develop altered layers (cracks, grain refinement, etc.) due to mechanical polishing
Possible to use liquid nitrogen for cooling (Effective for low-melting-point metals such as solder and polymers that are easily altered or deformed by the heat of machining during cross-sectional fabrication).

Main Specifications

Ion acceleration voltage	2～6ｋV
Ion Beam Diameter	500μm or more (half width value)
Milling Speed	100μm/h (average of 2 hours, acceleration voltage 6 kV, Si equivalent, edge distance 100 μm)
Sample Swing Function	Automatic ±30°swing of material during milling
Maximum Size of Loaded Materials	11mm (width) x 10mm (length) x 2mm (thickness)
Sample Rotation Angle Adjustment Range	±5°

Operation Method	Touch panel, 6.5-inch display
Machining Alignment Method	Monitored on the sample stage vis CCD camera
Magnification of Alignment Camera	Approximately 70x (on 6.5-inch display)
Magnification of Machining Observation Camera	Approximately 20x – 100x (on 6.5-inch display)
Preset Functions	5 preset options for machining conditions (acceleration voltage, Ar gas flow rate, machining time)
Ion Gas	Argon

Equipment Photo

Click on the photo to enlarge.

Overall view of the equipment
Liquid nitrogen container for sample cooling and monitor camera for sample observation