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Material Solutions Center, Tohoku University(MaSC)

Shared equipment

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  • Shared equipment
  • Focused Ion Beams/Scanning Electron Microscope Dual-beam System(FIB/SEM)
Shared equipment

Shared equipment

Focused Ion Beams/Scanning Electron Microscope Dual-beam System(FIB/SEM)

Focused Ion Beams/Scanning Electron Microscope Dual-beam System(FIB/SEM)
Helios NanoLabTM 600i

Equipment Overview (Purpose)

Nanoscale microfabrication, observation, analysis and sample preparation using Ga ion beams.

Main Features and Applications

【Features】

  • Ultra-high resolution SEM observation
     Possible to use as a dual-beam (FIB-SEM) system with sub-nanometer resolution.
  • High precision, high speed FIB processing
    Equipped with the latest model of FIB, with the latest differential pumping system. The FIB column has excellent processing characteristics in all acceleration voltage ranges compared to conventional FIB columns, enabling the preparation of high-quality
  • Use of the latest software for automatic 3D analysis
    Next generation 3D analysis made possible by the latest guidance analysis software.

【用途】

  • TEMサンプル作製、サブミクロン実験用試料作製、断面観察、3D解析用イメージ取得

主な仕様

SEM
Irradiation Voltage 50V~30kV
Imaging Resolution 0.9nm@15kV、 1.4nm@1kV
FIB
Accelerating Voltage 500V~30kV
Imaging Resolution 2.5nm@15kV
Maximum Current Value 65nA
GIS Pt、C
Manipulator Easy Lift

Available Optional Features & Option Purpose

Available Optional Features Option Purpose
Available Optional Features:Thermo Fisher Scientific Amira Option Purpose:Visualize, process, and evaluate 3D data from computer tomography, microscopy results, MRI, etc.
Available Optional Features:EDS(AMETEC EDAX-EDS SDD60mm2、TEAM) Option Purpose:Identification and quantification of sample elements
Available Optional Features:EBSD(AMETEC TSL-EBSD DigView、OIM) Option Purpose:Orientation analysis of crystalline samples
Available Optional Features:MAPS Option Purpose:Automatic acquisition of high area images
Available Optional Features:Auto Slice & View Option Purpose:Automated cross-sectional slicing and SEM image acquisition software for 3D reconstruction applications
Available Optional Features:EDS3 Option Purpose:Automated cross-sectional slicing and EDS data acquisition software for 3D reconstruction applications
Available Optional Features:EBSD3 Option Purpose:EBSD3 Automated cross-sectional slicing and EBSD data acquisition software for 3D reconstruction applications
Available Optional Features:CryoMAT Option Purpose:Sample freezing by cooling stage

Equipment Photo

Click on the photo to enlarge.

  • FIB/SEM デュアルビームシステム

    Overall view of the equipment

  • FIB/SEM デュアルビームシステム

    Main body of FIBSEM equipment

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