Focused Ion Beams/Scanning Electron Microscope Dual-beam System(FIB/SEM)

Focused Ion Beams/Scanning Electron Microscope Dual-beam System(FIB/SEM)
Helios NanoLab^TM 600i

Equipment Overview (Purpose)

Nanoscale microfabrication, observation, analysis and sample preparation using Ga ion beams.

Main Features and Applications

【Features】

• Ultra-high resolution SEM observation
  　Possible to use as a dual-beam (FIB-SEM) system with sub-nanometer resolution.
• High precision, high speed FIB processing
  Equipped with the latest model of FIB, with the latest differential pumping system. The FIB column has excellent processing characteristics in all acceleration voltage ranges compared to conventional FIB columns, enabling the preparation of high-quality
• Use of the latest software for automatic 3D analysis
  Next generation 3D analysis made possible by the latest guidance analysis software.

【用途】

• TEMサンプル作製、サブミクロン実験用試料作製、断面観察、3D解析用イメージ取得

主な仕様

Available Optional Features & Option Purpose

Available Optional Features	Option Purpose
Available Optional Features：Thermo Fisher Scientific　Amira	Option Purpose：Visualize, process, and evaluate 3D data from computer tomography, microscopy results, MRI, etc.
Available Optional Features：EDS（AMETEC　EDAX-EDS　SDD60mm2、TEAM）	Option Purpose：Identification and quantification of sample elements
Available Optional Features：EBSD（AMETEC　TSL-EBSD　DigView、OIM）	Option Purpose：Orientation analysis of crystalline samples
Available Optional Features：MAPS	Option Purpose：Automatic acquisition of high area images
Available Optional Features：Auto　Slice　&　View	Option Purpose：Automated cross-sectional slicing and SEM image acquisition software for 3D reconstruction applications
Available Optional Features：EDS3	Option Purpose：Automated cross-sectional slicing and EDS data acquisition software for 3D reconstruction applications
Available Optional Features：EBSD3	Option Purpose：EBSD3 Automated cross-sectional slicing and EBSD data acquisition software for 3D reconstruction applications
Available Optional Features：CryoMAT	Option Purpose：Sample freezing by cooling stage

Equipment Photo